| Membrane |
Process |
Thickness |
Advantage |
| Surface |
Inside |
PYROCARB
Carbon |
Chemical Vapor
Deposition |
40 micron |
Nothing |
1. Impermeability
2. High purification
3. Resistance corrosion |
TaC-Coat
Tantalum
Carbide |
Chemical Vapor
Deposition |
20 micron |
Nothing |
1.Impermeability
2.High purification
3. Resistance corrosion |
SiC-Coat
Silicon
Carbide |
Chemical Vapor
Deposition |
50,100
micron |
Nothing |
1. Impermeability
2. High purification
3. Resistance corrosion |
Ceracarb
Silicon
carbide |
Chemical Vapor
Deposition
(Conversion) |
Nothing |
0.5-1mm |
1. Thermalstability
2. Wear
3. anticorrosion |
GC-Coat
Glassy
Carbon |
Carbonized a
resin Apply
and infiltrate |
2-3
micron |
<1.0mm |
1. Prevent dust
2. High purification |
GC-Coat
(VGI)
Glassy
Carbon |
Carbonized a
resin Apply
and infiltrate |
<0.5
micron |
<6.0mm |
1. Prevent dust
2. High purification |
