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| IBIDEN's CVD-SiC are
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1.
2. |
Products which have elaborate Silicon
Carbide coating on bare graphite by CVD.
Products which are grown as SiC bulk.
These products are superior for particle, low wear and resistance to chemical corrosion. |
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Picture:
Surface By SEM |
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Picture:
Cross section By SEM |
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| 1. |
High purification and low absorption and degassing
of impurities. |
| 2. |
Superior heat resistance |
| 3. |
High strength |
| 4. |
Superior thermal shock |
| 5. |
Superior resistance oxidize and chemical corrosion. |
| 6. |
Possibility to grow thick membrane. |
| 7. |
Possibility to produce large size. |
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Crystal structure
shows 3C(Beta-SiC) |
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